Problem svgcoat SNF 2009-12-11 07:50:30: 220-7 alarm

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Dec 11 09:17:35 PST 2009


replaced bottle Purged line , Cleaned Catch cup and Belts, hotplate
, Empty  Resist Residue Secondary ContainerCycled wafers, Ok to use 




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