From lilihsu at snf.stanford.edu Tue Feb 3 15:10:11 2009 From: lilihsu at snf.stanford.edu (lilihsu at snf.stanford.edu) Date: Tue, 3 Feb 2009 15:10:11 -0800 Subject: Problem svgcoat SNF 2009-02-03 15:10:11: 7um resist Message-ID: Wooshik, Ju, Mahnaz and I have cleaned the 7um tube and run more than 5 wafers, but the suck back for that resist does not seem to be operating properly. From lilihsu at snf.stanford.edu Tue Feb 3 16:17:05 2009 From: lilihsu at snf.stanford.edu (lilihsu at snf.stanford.edu) Date: Tue, 3 Feb 2009 16:17:05 -0800 Subject: Problem svgcoat SNF 2009-02-03 16:17:05: 7um resist Message-ID: after the bottle of resist was replaced, we cleaned the nnozzle with acetone again, ran a couple of dummies, but still there were problems with the suck back it apears that the resist dripped on the wafer after it was supposed to stop squirting. From jwpchen at snf.stanford.edu Tue Feb 3 20:37:21 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Tue, 3 Feb 2009 20:37:21 -0800 Subject: Problem svgcoat SNF 2009-02-03 20:37:21: hotplate off? Message-ID: hotplate temperature has no display, hotplate seems to be off From gsosa at snf.stanford.edu Wed Feb 4 08:03:39 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 4 Feb 2009 08:03:39 -0800 Subject: Shutdown svgcoat SNF 2009-02-04 08:03:38: Temperature controller dead Message-ID: The temperature controller for the hotplate is dead. Need to find replacement. From gsosa at snf.stanford.edu Wed Feb 4 15:15:21 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 4 Feb 2009 15:15:21 -0800 Subject: Shutdown svgcoat SNF 2009-02-04 08:03:38: Temperature controller dead Message-ID: Troubleshot and found broken reset switch external to the temperature controller. Bypassed the switch - temporarily. restored power to temperature controler. Heated up and stabilized heatr block temperature. Checked and calibrated temperature. Checked 3612 1.0 micron thickness. All OK ( Mean: 10262 Angstroms. Std Dev: 34 Angstroms. System ready to use. From gsosa at snf.stanford.edu Wed Feb 4 15:15:28 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 4 Feb 2009 15:15:28 -0800 Subject: Problem svgcoat SNF 2009-02-03 20:37:21: hotplate off? Message-ID: Troubleshot and found broken reset switch external to the temperature controller. Bypassed the switch - temporarily. restored power to temperature controler. Heated up and stabilized heatr block temperature. Checked and calibrated temperature. Checked 3612 1.0 micron thickness. All OK ( Mean: 10262 Angstroms. Std Dev: 34 Angstroms. System ready to use. From vilanova at snf.stanford.edu Fri Feb 6 11:21:24 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 6 Feb 2009 11:21:24 -0800 Subject: Problem svgcoat SNF 2009-02-03 16:17:05: 7um resist Message-ID: adjusted suck back and tested system , Uniformity looks good , all you got to do is clean the tip of the dispense hose from time to time so Old resist doesnt accumulate on it Also the Amount of acetone that we use to clean the tip is very minimum to avoid getting Acetone all over the wafer while cleaning the dispense hose , tested ok ready to use From vilanova at snf.stanford.edu Fri Feb 6 11:21:31 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 6 Feb 2009 11:21:31 -0800 Subject: Problem svgcoat SNF 2009-02-03 15:10:11: 7um resist Message-ID: adjusted suck back and tested system , Uniformity looks good , all you got to do is clean the tip of the dispense hose from time to time so Old resist doesnt accumulate on it Also the Amount of acetone that we use to clean the tip is very minimum to avoid getting Acetone all over the wafer while cleaning the dispense hose , tested ok ready to use From xhlim at snf.stanford.edu Sat Feb 7 16:43:26 2009 From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu) Date: Sat, 7 Feb 2009 16:43:26 -0800 Subject: Problem svgcoat SNF 2009-02-07 16:43:26: Problem with sender station Message-ID: Unable to detect wafer cassette at the sender station. From gsosa at snf.stanford.edu Mon Feb 9 08:31:56 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 9 Feb 2009 08:31:56 -0800 Subject: Problem svgcoat SNF 2009-02-07 16:43:26: Problem with sender station Message-ID: Tested track operation-OK. Checked utility panel for interlocks-OK. System ran OK with no problems. Cleaned coater bowl. From lilihsu at snf.stanford.edu Tue Feb 10 16:13:28 2009 From: lilihsu at snf.stanford.edu (lilihsu at snf.stanford.edu) Date: Tue, 10 Feb 2009 16:13:28 -0800 Subject: Problem svgcoat SNF 2009-02-10 16:13:28: 7um resist suck back Message-ID: Ju and I have cleaned the nozzle with acetone and run about 9 dummies total. The dummy wafers tend to look alright, and then the good wafer looks aweful, with a huge spotch in the middle. I have noticed that the suck back tdoes not seem to be very strong and on this last wafer it was obviously not functioning properly. From mahnaz at snf.stanford.edu Wed Feb 11 11:53:37 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 11 Feb 2009 11:53:37 -0800 Subject: Problem svgcoat SNF 2009-02-11 11:53:36: 7 um 220-7 Message-ID: I cleaned the nozzel amd ran 7 dummies, I took my time and cleaned the nozzeol every time and ran 4 product wafers every one is bad. Non uniformity and speed boat. Thickness is good 72550A. Needs immidate help. From ajamo at snf.stanford.edu Fri Feb 13 13:42:41 2009 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Fri, 13 Feb 2009 13:42:41 -0800 Subject: Problem svgcoat SNF 2009-02-13 13:42:41: 10 um program Message-ID: strayations & some holes (voids) in the 10 um coating SPR220-7. Nozzel was cleaned well before and in between wafers. From lilihsu at snf.stanford.edu Tue Feb 17 17:40:11 2009 From: lilihsu at snf.stanford.edu (lilihsu at snf.stanford.edu) Date: Tue, 17 Feb 2009 17:40:11 -0800 Subject: Problem svgcoat SNF 2009-02-17 17:40:11: EBR Message-ID: the 2mm EBR is quite skinny- more like 1mm. From laurahughes at snf.stanford.edu Tue Feb 17 19:20:00 2009 From: laurahughes at snf.stanford.edu (laurahughes at snf.stanford.edu) Date: Tue, 17 Feb 2009 19:20:00 -0800 Subject: Comment svgcoat SNF 2009-02-17 19:20:00: Message-ID: Coater had trouble transferring a wafer; the wafer didn't transfer from the VP station to the coater, and the receivers wouldn't raise. System was reset. From alsune at snf.stanford.edu Wed Feb 18 13:57:21 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Wed, 18 Feb 2009 13:57:21 -0800 Subject: Comment svgcoat SNF 2009-02-18 13:57:21: 7um Program#4 Message-ID: The quality of the coating coming out from 7um program #4 is not good. Cleaned the nozzles prior to coating and 1-2 dummy wafers were used before the real wafer. From vilanova at snf.stanford.edu Wed Feb 18 15:29:42 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 18 Feb 2009 15:29:42 -0800 Subject: Comment svgcoat SNF 2009-02-17 19:20:00: Message-ID: From dgunning at snf.stanford.edu Thu Feb 19 05:54:47 2009 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Thu, 19 Feb 2009 05:54:47 -0800 Subject: Problem svgcoat SNF 2009-02-19 05:54:47: please fix 7um!! Message-ID: From vilanova at snf.stanford.edu Thu Feb 19 08:21:21 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 19 Feb 2009 08:21:21 -0800 Subject: Problem svgcoat SNF 2009-02-17 17:40:11: EBR Message-ID: checked and measure EBR ( 2mm ) Ran wafers All of them Came up with 2mm EBR. From vilanova at snf.stanford.edu Thu Feb 19 11:24:32 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 19 Feb 2009 11:24:32 -0800 Subject: Comment svgcoat SNF 2009-02-19 11:24:31: PLEASE DO NOT USE 22-7 PROGRAM # 4. 6 Message-ID: PLEASE DO NOT USE PROGRAM # 4 AND 6 ( RESIST # 2 , 22-7) WE ARE WORKING ON IT AND WE DONT WANT TO SHUTDOWN THE ENTIRE TRACK SO PLEASE DO NOT USE 22-7 From filip at snf.stanford.edu Fri Feb 20 09:16:58 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Fri, 20 Feb 2009 09:16:58 -0800 Subject: Problem svgcoat SNF 2009-02-20 09:16:57: EBR not working properly Message-ID: does 1mm instead of 2mm, 2mm instead of 5mm From vilanova at snf.stanford.edu Mon Feb 23 11:26:00 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 23 Feb 2009 11:26:00 -0800 Subject: Problem svgcoat SNF 2009-02-20 09:16:57: EBR not working properly Message-ID: fixed LAst Friday.- From gsosa at snf.stanford.edu Wed Feb 25 08:00:54 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Feb 2009 08:00:54 -0800 Subject: Shutdown svgcoat SNF 2009-02-25 08:00:54: working on 7.0 micron Message-ID: Working on 7.0 poor spin problems. From gsosa at snf.stanford.edu Wed Feb 25 09:33:16 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Feb 2009 09:33:16 -0800 Subject: Shutdown svgcoat SNF 2009-02-25 08:00:54: working on 7.0 micron Message-ID: Re-routed and trimmed the dispense line to remove the kinks. Checked and adjusted dispense volumes. Checked and adjusted nozzle height. Spin quality looks much better. Please run a few dummies before processing you wafers and also clean the nozzle between wafers. We are still investigating some issues in order to improve the spin quality. From gsosa at snf.stanford.edu Wed Feb 25 09:33:24 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Feb 2009 09:33:24 -0800 Subject: Comment svgcoat SNF 2009-02-19 11:24:31: PLEASE DO NOT USE 22-7 PROGRAM # 4. 6 Message-ID: Re-routed and trimmed the dispense line to remove the kinks. Checked and adjusted dispense volumes. Checked and adjusted nozzle height. Spin quality looks much better. Please run a few dummies before processing you wafers and also clean the nozzle between wafers. We are still investigating some issues in order to improve the spin quality. From gsosa at snf.stanford.edu Wed Feb 25 09:33:32 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Feb 2009 09:33:32 -0800 Subject: Problem svgcoat SNF 2009-02-19 05:54:47: please fix 7um!! Message-ID: Re-routed and trimmed the dispense line to remove the kinks. Checked and adjusted dispense volumes. Checked and adjusted nozzle height. Spin quality looks much better. Please run a few dummies before processing you wafers and also clean the nozzle between wafers. We are still investigating some issues in order to improve the spin quality. From gsosa at snf.stanford.edu Wed Feb 25 09:33:39 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Feb 2009 09:33:39 -0800 Subject: Comment svgcoat SNF 2009-02-18 13:57:21: 7um Program#4 Message-ID: Re-routed and trimmed the dispense line to remove the kinks. Checked and adjusted dispense volumes. Checked and adjusted nozzle height. Spin quality looks much better. Please run a few dummies before processing you wafers and also clean the nozzle between wafers. We are still investigating some issues in order to improve the spin quality. From gsosa at snf.stanford.edu Wed Feb 25 09:33:45 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Feb 2009 09:33:45 -0800 Subject: Problem svgcoat SNF 2009-02-13 13:42:41: 10 um program Message-ID: Re-routed and trimmed the dispense line to remove the kinks. Checked and adjusted dispense volumes. Checked and adjusted nozzle height. Spin quality looks much better. Please run a few dummies before processing you wafers and also clean the nozzle between wafers. We are still investigating some issues in order to improve the spin quality. From gsosa at snf.stanford.edu Wed Feb 25 09:33:53 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Feb 2009 09:33:53 -0800 Subject: Problem svgcoat SNF 2009-02-11 11:53:36: 7 um 220-7 Message-ID: Re-routed and trimmed the dispense line to remove the kinks. Checked and adjusted dispense volumes. Checked and adjusted nozzle height. Spin quality looks much better. Please run a few dummies before processing you wafers and also clean the nozzle between wafers. We are still investigating some issues in order to improve the spin quality. From gsosa at snf.stanford.edu Wed Feb 25 09:34:00 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Feb 2009 09:34:00 -0800 Subject: Problem svgcoat SNF 2009-02-10 16:13:28: 7um resist suck back Message-ID: Re-routed and trimmed the dispense line to remove the kinks. Checked and adjusted dispense volumes. Checked and adjusted nozzle height. Spin quality looks much better. Please run a few dummies before processing you wafers and also clean the nozzle between wafers. We are still investigating some issues in order to improve the spin quality. From gsosa at snf.stanford.edu Wed Feb 25 09:34:45 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Feb 2009 09:34:45 -0800 Subject: Problem svgcoat SNF 2009-02-25 09:34:44: 7.0 Micron Status 2/25/09 Message-ID: Re-routed and trimmed the dispense line to remove the kinks. Checked and adjusted dispense volumes. Checked and adjusted nozzle height. Spin quality looks much better. Please run a few dummies before processing you wafers and also clean the nozzle between wafers. We are still investigating some issues in order to improve the spin quality.