Problem svgcoat SNF 2009-02-03 15:10:11: 7um resist

lilihsu at snf.stanford.edu lilihsu at snf.stanford.edu
Tue Feb 3 15:10:11 PST 2009


Wooshik, Ju, Mahnaz and I have cleaned the 7um tube and run more than 5 wafers, but the suck back for that resist does not seem to be operating properly.




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