Problem svgcoat SNF 2009-02-03 16:17:05: 7um resist

lilihsu at snf.stanford.edu lilihsu at snf.stanford.edu
Tue Feb 3 16:17:05 PST 2009


after the bottle of resist was replaced, we cleaned the nnozzle with acetone again, ran a couple of dummies, but still there were problems with the suck back it apears that the resist dripped on the wafer after it was supposed to stop squirting.




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