Problem svgcoat SNF 2009-02-03 16:17:05: 7um resist
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Fri Feb 6 11:21:24 PST 2009
adjusted suck back and tested system , Uniformity looks good
, all you got to do is clean the tip of the dispense hose
from time to time so Old resist doesnt accumulate on it
Also the Amount of acetone that we use to clean the tip
is very minimum to avoid getting Acetone all over the wafer
while cleaning the dispense hose , tested ok ready to use
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