Problem svgcoat SNF 2009-02-03 15:10:11: 7um resist

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Feb 6 11:21:31 PST 2009


adjusted suck back and tested system , Uniformity looks good
, all you got to do is clean the tip of the dispense hose
from time to time so Old resist doesnt accumulate on it
Also  the Amount of acetone that we use to clean the tip 
is very minimum  to avoid getting Acetone all over the wafer
while cleaning the dispense hose , tested ok ready to use 




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