Problem svgcoat SNF 2009-02-10 16:13:28: 7um resist suck back

lilihsu at snf.stanford.edu lilihsu at snf.stanford.edu
Tue Feb 10 16:13:28 PST 2009


Ju and I have cleaned the nozzle with acetone and run about 9 dummies total.  The dummy wafers tend to look alright, and then the good wafer looks aweful, with a huge spotch in the middle.  I have noticed that the suck back tdoes not seem to be very strong and on this last wafer it was obviously not functioning properly.




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