Comment svgcoat SNF 2009-02-17 19:20:00:
laurahughes at snf.stanford.edu
laurahughes at snf.stanford.edu
Tue Feb 17 19:20:00 PST 2009
Coater had trouble transferring a wafer; the wafer didn't transfer from the VP station to the coater, and the receivers wouldn't raise. System was reset.
More information about the svgcoat-pcs
mailing list