Comment svgcoat SNF 2009-02-18 13:57:21: 7um Program#4

alsune at alsune at
Wed Feb 18 13:57:21 PST 2009

The quality of the coating coming out from 7um program #4 is not good. Cleaned the nozzles prior to coating and 1-2 dummy wafers were used before the real wafer.

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