Problem svgcoat SNF 2009-02-19 05:54:47: please fix 7um!!

gsosa at gsosa at
Wed Feb 25 09:33:32 PST 2009

Re-routed  and trimmed the dispense line to remove the kinks. Checked and adjusted dispense volumes. Checked and adjusted nozzle height.  Spin quality looks much better. Please run a few dummies before processing you wafers and also clean the nozzle between wafers. We are still investigating some issues in order to improve the spin quality.   

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