Problem svgcoat SNF 2009-02-13 13:42:41: 10 um program

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Feb 25 09:33:45 PST 2009


Re-routed  and trimmed the dispense line to remove the kinks. Checked and adjusted dispense volumes. Checked and adjusted nozzle height.  Spin quality looks much better. Please run a few dummies before processing you wafers and also clean the nozzle between wafers. We are still investigating some issues in order to improve the spin quality.   




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