Problem svgcoat SNF 2009-02-10 16:13:28: 7um resist suck back

[gsosa at snf.stanford.edu]

Re-routed  and trimmed the dispense line to remove the kinks. Checked and adjusted dispense volumes. Checked and adjusted nozzle height.  Spin quality looks much better. Please run a few dummies before processing you wafers and also clean the nozzle between wafers. We are still investigating some issues in order to improve the spin quality.