From gsosa at snf.stanford.edu Mon Jan 5 16:08:50 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 5 Jan 2009 16:08:50 -0800 Subject: Comment svgcoat SNF 2009-01-05 16:08:50: Thickness Tests 01/05/09 Message-ID: Thickness Tests 3612 Resist Target: 1.0 Microns, Measured: Ave-10338A, Std Dev 26A Target: 1.6 Microns, Measured: Ave- 17154A, Std Dev 14A 3617 Resist Target:1.6 Microns, Measured: Ave-16078A, Std Dev 13A EBR looks good, Backside looks clean From gsosa at snf.stanford.edu Mon Jan 5 16:30:35 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 5 Jan 2009 16:30:35 -0800 Subject: Comment svgcoat SNF 2009-01-05 16:30:35: 220-7 Down Message-ID: The 220-7 resist programs are unavailable. The controller for the Cybpr pump was sent out for repair. From nharjee at snf.stanford.edu Fri Jan 9 10:51:15 2009 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Fri, 9 Jan 2009 10:51:15 -0800 Subject: Comment svgcoat SNF 2009-01-09 10:51:14: 220-7 ETA? Message-ID: What's the ETA for 220-7 coming back up? Thanks. From gsosa at snf.stanford.edu Mon Jan 12 15:59:26 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 12 Jan 2009 15:59:26 -0800 Subject: Comment svgcoat SNF 2009-01-12 15:59:26: 220-7 Update 1/12 Message-ID: The repairs to the Cypor pump controller are completed and the controller will be shipped back to us from Texas tomorrow(1/13). I expect to recieve and install the controller on Wednesday( 1/14). This controller controls the 220-7 pump on SVG #1 and the 220-3 pump on SVG #2. Please check Coral for updates. > > ..Gary From mahnaz at snf.stanford.edu Wed Jan 14 11:22:03 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 14 Jan 2009 11:22:03 -0800 Subject: Comment svgcoat SNF 2009-01-14 11:22:02: 1 um 3612 Message-ID: looks good, 10330A From gsosa at snf.stanford.edu Fri Jan 16 11:47:46 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Jan 2009 11:47:46 -0800 Subject: Problem svgcoat SNF 2008-12-12 17:07:36: 220-7 um no good Message-ID: Installed and programmed backup cybor pump controller. Rurged acetone out of pump. Purged in 220-7 resist.. Ran dummy and test wafers. all looks good. Thickness test results: Target: 7.0 Microns Mean (5 points): 74363 A Std Dev: 64 A From shott at snf.stanford.edu Tue Jan 20 07:21:21 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:21:21 -0800 Subject: Comment svgcoat SNF 2008-01-03 17:52:43: 1um and 1.6 um tested ok Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:21:28 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:21:28 -0800 Subject: Problem svgcoat SNF 2008-01-10 17:39:08: Vapor prime module down Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:21:33 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:21:33 -0800 Subject: Comment svgcoat SNF 2008-03-05 11:39:37: ran 955 iline perfect Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:21:39 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:21:39 -0800 Subject: Problem svgcoat SNF 2008-03-06 14:50:53: How long before the primer will be operational Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:21:45 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:21:45 -0800 Subject: Comment svgcoat SNF 2008-03-17 14:49:14: Vapor Prime Module Status Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:21:50 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:21:50 -0800 Subject: Comment svgcoat SNF 2008-04-28 18:40:01: SVG 1 Quals, Week of 4/27 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:21:56 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:21:56 -0800 Subject: Comment svgcoat SNF 2008-07-17 10:32:16: HMDS Vapor prime Update Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:22:01 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:22:01 -0800 Subject: Comment svgcoat SNF 2008-08-15 12:06:06: I line 955-.7 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:22:06 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:22:06 -0800 Subject: Comment svgcoat SNF 2008-08-18 15:39:03: Power failure recovery Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:22:11 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:22:11 -0800 Subject: Comment svgcoat SNF 2008-09-29 15:41:51: Replaced 955-.7 bottle Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:22:16 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:22:16 -0800 Subject: Comment svgcoat SNF 2008-09-29 16:09:22: ran 3612 1 um Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:22:22 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:22:22 -0800 Subject: Comment svgcoat SNF 2008-10-07 11:59:14: 10/7 uniformity test Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:22:27 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:22:27 -0800 Subject: Comment svgcoat SNF 2008-10-14 16:14:28: SPR 955-.7 Test Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:22:44 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:22:44 -0800 Subject: Comment svgcoat SNF 2008-11-03 08:54:53: SPR 955-0.7 Test 11/3 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:22:50 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:22:50 -0800 Subject: Comment svgcoat SNF 2008-11-11 09:07:06: SPR-955 .7 Thickness test 11/11 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:22:56 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:22:56 -0800 Subject: Comment svgcoat SNF 2008-11-18 09:05:58: 11/18 955 Thickness test 0.7um Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:23:03 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:23:03 -0800 Subject: Comment svgcoat SNF 2008-12-01 15:50:02: 12/1 955 0.7um Thickness test Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:23:09 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:23:09 -0800 Subject: Comment svgcoat SNF 2008-12-04 15:04:41: program # 5 ( 955 Resist) Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:23:15 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:23:15 -0800 Subject: Comment svgcoat SNF 2008-12-08 07:56:22: cleaned catch cup and hotplate Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:23:21 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:23:21 -0800 Subject: Comment svgcoat SNF 2008-12-09 09:55:20: ran 1.6 um Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:23:28 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:23:28 -0800 Subject: Comment svgcoat SNF 2009-01-05 16:08:50: Thickness Tests 01/05/09 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:23:34 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:23:34 -0800 Subject: Comment svgcoat SNF 2009-01-05 16:30:35: 220-7 Down Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:23:41 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:23:41 -0800 Subject: Comment svgcoat SNF 2009-01-09 10:51:14: 220-7 ETA? Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:23:49 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:23:49 -0800 Subject: Comment svgcoat SNF 2009-01-12 15:59:26: 220-7 Update 1/12 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:23:55 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:23:55 -0800 Subject: Comment svgcoat SNF 2009-01-14 11:22:02: 1 um 3612 Message-ID: To the archives ... From vilanova at snf.stanford.edu Wed Jan 21 08:21:21 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 21 Jan 2009 08:21:21 -0800 Subject: Problem svgcoat SNF 2009-01-21 08:21:20: The HMDS PArt is still Down. Message-ID: From gsosa at snf.stanford.edu Thu Jan 29 11:11:25 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 29 Jan 2009 11:11:25 -0800 Subject: Comment svgcoat SNF 2009-01-29 11:11:25: Vapor prime status Message-ID: Hi All.... The vapor prime module on SVG track #1 has been permanently decommisioned. Please do not be alarmed when you see that the bake cap is no longer there. We removed it as part of the de-activation. In addition, the HMDS supply cannister is completely disconnected to prevent the possibility of an accidental discharge, all vapor prime related recipes are deactivated in recipe manager, and the hotplate temperature will be ramped down to a safe temperature. Please let me know if you have any questions or concerns. ...Gary From gsosa at snf.stanford.edu Thu Jan 29 14:40:15 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 29 Jan 2009 14:40:15 -0800 Subject: Problem svgcoat SNF 2009-01-21 08:21:20: The HMDS PArt is still Down. Message-ID: Hi All.... The vapor prime module on SVG track #1 has been permanently decommisioned. Please do not be alarmed when you see that the bake cap is no longer there. We removed it as part of the de-activation. In addition, the HMDS supply cannister is completely disconnected to prevent the possibility of an accidental discharge, all vapor prime related recipes are deactivated in recipe manager, and the hotplate temperature will be ramped down to a safe temperature. Please let me know if you have any questions or concerns. ...Gary