Comment svgcoat SNF 2009-01-05 16:08:50: Thickness Tests 01/05/09

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Jan 5 16:08:50 PST 2009


Thickness Tests
3612 Resist
Target: 1.0 Microns, Measured: Ave-10338A, Std Dev 26A
Target: 1.6 Microns, Measured: Ave- 17154A, Std Dev 14A
3617 Resist
Target:1.6 Microns, Measured: Ave-16078A, Std Dev 13A
EBR looks good, Backside looks clean
 




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