Problem svgcoat SNF 2008-12-12 17:07:36: 220-7 um no good

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jan 16 11:47:46 PST 2009


Installed  and programmed backup cybor pump controller.  Rurged acetone out of pump. Purged in 220-7 resist.. Ran dummy and test wafers. all looks good. Thickness test results:
  Target: 7.0 Microns
  Mean (5 points):  74363 A
  Std Dev: 64  A




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