From lwchang at snf.stanford.edu Fri Jul 3 15:30:18 2009 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Fri, 3 Jul 2009 15:30:18 -0700 Subject: Problem svgcoat SNF 2009-07-03 15:30:18: Resist dropped during coating Message-ID: had to rework almost all of the wafers... From gsosa at snf.stanford.edu Sun Jul 5 13:37:45 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 5 Jul 2009 13:37:45 -0700 Subject: Problem svgcoat SNF 2009-07-03 15:30:18: Resist dropped during coating Message-ID: Large air gap in dispense line for 3612 resist. Checked resist bottle OK. Purged dispense line. Checked and adjusted suckback. Tested with dummy wafers. Coatings look good. From vilanova at snf.stanford.edu Wed Jul 15 14:12:12 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 15 Jul 2009 14:12:12 -0700 Subject: Comment svgcoat SNF 2009-06-25 03:19:07: messy hotplate Message-ID: cleaned From vilanova at snf.stanford.edu Wed Jul 15 14:12:43 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 15 Jul 2009 14:12:43 -0700 Subject: Comment svgcoat SNF 2009-06-03 15:22:04: spinner center just slightly off wafer center Message-ID: Adjusted centering tabs, tested , ok to use. From sdogbe at snf.stanford.edu Mon Jul 20 17:06:21 2009 From: sdogbe at snf.stanford.edu (sdogbe at snf.stanford.edu) Date: Mon, 20 Jul 2009 17:06:21 -0700 Subject: Problem svgcoat SNF 2009-07-20 17:06:20: SVG 1 Message-ID: Spin coater chuck is not able to lift up to receive wafers. From vilanova at snf.stanford.edu Tue Jul 21 07:55:22 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 21 Jul 2009 07:55:22 -0700 Subject: Problem svgcoat SNF 2009-07-20 17:06:20: SVG 1 Message-ID: there was absolutly nothing wrong with the system , I cycled many wafers ( cleaned catch cup hotplate and belts) And I couldnt repeat the problem , Ok to use. From king at snf.stanford.edu Wed Jul 22 21:16:23 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 22 Jul 2009 21:16:23 -0700 Subject: Problem svgcoat SNF 2009-07-22 21:16:23: leaving PR on backsides Message-ID: which could cause problems for ASML so be sure to clean up beforehand. From vilanova at snf.stanford.edu Thu Jul 23 08:07:59 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 23 Jul 2009 08:07:59 -0700 Subject: Problem svgcoat SNF 2009-07-22 21:16:23: leaving PR on backsides Message-ID: Refilled EBR canisters cleaned chuck belts and catch cup bowl , Cycled Glass wafers to make sure bottom EBR nozzle works , Bottom wafers ]are clean, replaced Empty resist Bottles .Ok to use. make sure the chuck and hotplates are clean before you run your wafers, sometimes people run the thick resist with no EBR and that leaves a lot of resist on the chuck and the hotplate . From junil at snf.stanford.edu Fri Jul 24 02:21:26 2009 From: junil at snf.stanford.edu (junil at snf.stanford.edu) Date: Fri, 24 Jul 2009 02:21:26 -0700 Subject: Problem svgcoat SNF 2009-07-24 02:21:26: coater track not moving Message-ID: From vilanova at snf.stanford.edu Fri Jul 24 07:58:28 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 24 Jul 2009 07:58:28 -0700 Subject: Problem svgcoat SNF 2009-07-24 02:21:26: coater track not moving Message-ID: the waste small carboy container In the bottom was full, there is 2 buttons on the right top hand side of the coater track , first make sure the carboy is Empty if is not press and hold button # 1 Until the Alarm goes Off. Same thing for Coat track # 2, Cycled wafers , Ready to use. From gth at snf.stanford.edu Sat Jul 25 02:03:40 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sat, 25 Jul 2009 02:03:40 -0700 Subject: Problem svgcoat SNF 2009-07-25 02:03:39: last drop of PR - bad spins. 1u 3612 Rcp 7 Message-ID: From vilanova at snf.stanford.edu Mon Jul 27 07:45:26 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Jul 2009 07:45:26 -0700 Subject: Problem svgcoat SNF 2009-07-25 02:03:39: last drop of PR - bad spins. 1u 3612 Rcp 7 Message-ID: Adjusted Suck back, Cycled wafers, Uniformity Looks Good Ok to use. From haiwei at snf.stanford.edu Tue Jul 28 00:22:52 2009 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Tue, 28 Jul 2009 00:22:52 -0700 Subject: Problem svgcoat SNF 2009-07-28 00:22:52: can't transfer wafer onto the oven Message-ID: From vilanova at snf.stanford.edu Tue Jul 28 07:46:58 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 28 Jul 2009 07:46:58 -0700 Subject: Problem svgcoat SNF 2009-07-28 00:22:52: can't transfer wafer onto the oven Message-ID: Hotplate found full of photoresist , cleaned and cycled wafers Hotplate and transfer belts working FIne, Ok to use. From sbasumal at snf.stanford.edu Tue Jul 28 16:28:47 2009 From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu) Date: Tue, 28 Jul 2009 16:28:47 -0700 Subject: Problem svgcoat SNF 2009-07-28 16:28:46: SPR-220 - 7 BOTTLE ALMOST EMPTY Message-ID: SPR 220-7 LEVEL IS LOW IN THE BOTTLE From vilanova at snf.stanford.edu Wed Jul 29 07:41:12 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 29 Jul 2009 07:41:12 -0700 Subject: Problem svgcoat SNF 2009-07-28 16:28:46: SPR-220 - 7 BOTTLE ALMOST EMPTY Message-ID: Replaced Resist bottle , purge line , Cycled wafers, Ok to use. From vilanova at snf.stanford.edu Wed Jul 29 08:02:45 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 29 Jul 2009 08:02:45 -0700 Subject: Comment svgcoat SNF 2009-06-17 08:50:57: CLEANED , CATCH CUP,BELTS,HOTPLATES & DUMMY WAFERS Message-ID: Cleared. From vilanova at snf.stanford.edu Wed Jul 29 08:03:51 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 29 Jul 2009 08:03:51 -0700 Subject: Comment svgcoat SNF 2009-07-29 08:03:50: CLEANED CATCH CUP BELTS HOTPLATE Message-ID: CLEANED CATCH CUP BELTS HOTPLATE, DISPENSE HOSES REFILLED EBR CANISTER,CLEANED SECONDARY CONTAINER. From zpatel at snf.stanford.edu Thu Jul 30 14:12:27 2009 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Thu, 30 Jul 2009 14:12:27 -0700 Subject: Problem svgcoat SNF 2009-07-30 14:12:27: cannot login Message-ID: From gsosa at snf.stanford.edu Thu Jul 30 14:21:43 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 30 Jul 2009 14:21:43 -0700 Subject: Problem svgcoat SNF 2009-07-30 14:12:27: cannot login Message-ID: Showed user the login ID and password in the instruction book