Problem svgcoat SNF 2009-07-03 15:30:18: Resist dropped during coating

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sun Jul 5 13:37:45 PDT 2009


Large air gap in dispense line for 3612 resist. Checked resist bottle OK. Purged dispense line. Checked and adjusted suckback. Tested with dummy wafers. Coatings look good. 




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