Problem svgcoat SNF 2009-07-20 17:06:20: SVG 1

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Jul 21 07:55:22 PDT 2009


there was absolutly nothing wrong with the system , I cycled
many wafers ( cleaned catch cup hotplate and belts) And I couldnt 
repeat the problem , Ok to use. 




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