Problem svgcoat SNF 2009-07-22 21:16:23: leaving PR on backsides

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Jul 23 08:07:59 PDT 2009


Refilled EBR canisters cleaned chuck belts and catch cup bowl , Cycled Glass wafers to make sure  bottom  EBR nozzle works , Bottom wafers 
]are clean, replaced Empty resist Bottles .Ok to use.
make sure the chuck and hotplates are clean before you run your
 wafers, sometimes people run the thick resist with no EBR and that 
leaves a lot of resist on the chuck and the hotplate .




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