Problem svgcoat SNF 2009-07-22 21:16:23: leaving PR on backsides
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Thu Jul 23 08:07:59 PDT 2009
Refilled EBR canisters cleaned chuck belts and catch cup bowl , Cycled Glass wafers to make sure bottom EBR nozzle works , Bottom wafers
]are clean, replaced Empty resist Bottles .Ok to use.
make sure the chuck and hotplates are clean before you run your
wafers, sometimes people run the thick resist with no EBR and that
leaves a lot of resist on the chuck and the hotplate .
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