Problem svgcoat SNF 2009-07-24 02:21:26: coater track not moving

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Jul 24 07:58:28 PDT 2009


the waste  small carboy container In the bottom was full, there is 2 
buttons on the right top hand side of the coater track , first make sure
the carboy is Empty if is not press and hold button # 1 Until the
Alarm goes Off. Same thing for Coat track # 2, Cycled wafers , 
Ready to use. 




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