Problem svgcoat SNF 2009-07-28 00:22:52: can't transfer wafer onto the oven

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Jul 28 07:46:58 PDT 2009


Hotplate found full of photoresist , cleaned and cycled wafers
Hotplate and transfer belts working FIne, Ok to use. 




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