From pponce at snf.stanford.edu Wed Jun 3 15:22:05 2009 From: pponce at snf.stanford.edu (pponce at snf.stanford.edu) Date: Wed, 3 Jun 2009 15:22:05 -0700 Subject: Comment svgcoat SNF 2009-06-03 15:22:04: spinner center just slightly off wafer center Message-ID: From vilanova at snf.stanford.edu Fri Jun 5 08:50:21 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Jun 2009 08:50:21 -0700 Subject: Comment svgcoat SNF 2009-06-05 08:50:21: replaced old & dirty Wafers transfer belts. Message-ID: From helencxy at snf.stanford.edu Sun Jun 14 14:02:34 2009 From: helencxy at snf.stanford.edu (helencxy at snf.stanford.edu) Date: Sun, 14 Jun 2009 14:02:34 -0700 Subject: Problem svgcoat SNF 2009-06-14 14:02:33: upstream not ready, spin stage doesn't work Message-ID: I tried to reset the stage, but the same warning "upstream not ready" kept showing up, and the spin stage doesn't work/ reset properly. From vilanova at snf.stanford.edu Mon Jun 15 07:35:50 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 15 Jun 2009 07:35:50 -0700 Subject: Problem svgcoat SNF 2009-06-14 14:02:33: upstream not ready, spin stage doesn't work Message-ID: cycled wafers, could not repeat the problem, system ok ready to use. From vilanova at snf.stanford.edu Wed Jun 17 08:50:58 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 17 Jun 2009 08:50:58 -0700 Subject: Comment svgcoat SNF 2009-06-17 08:50:57: CLEANED , CATCH CUP,BELTS,HOTPLATES & DUMMY WAFERS Message-ID: CLEANED , CATCH CUP,BELTS,HOTPLATES & DUMMY WAFERS. From faridz at snf.stanford.edu Wed Jun 17 11:15:30 2009 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Wed, 17 Jun 2009 11:15:30 -0700 Subject: Problem svgcoat SNF 2009-06-17 11:15:29: bake side wafer transfer doesnt work Message-ID: From vilanova at snf.stanford.edu Wed Jun 17 11:39:19 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 17 Jun 2009 11:39:19 -0700 Subject: Problem svgcoat SNF 2009-06-17 11:15:29: bake side wafer transfer doesnt work Message-ID: One of the Wires for the motor that moves the hotplate Belts was almost disconnected I just plugged it back in and system starting to work fine , cycled wafers, good to use. From xzhuan1 at snf.stanford.edu Thu Jun 18 14:41:58 2009 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Thu, 18 Jun 2009 14:41:58 -0700 Subject: Problem svgcoat SNF 2009-06-18 14:41:57: hot plate rails do not come up fully Message-ID: From gsosa at snf.stanford.edu Thu Jun 18 15:31:19 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 18 Jun 2009 15:31:19 -0700 Subject: Problem svgcoat SNF 2009-06-18 14:41:57: hot plate rails do not come up fully Message-ID: Cleaned off resist ring from hotplate . Reset and tested track. All OK From lwchang at snf.stanford.edu Thu Jun 18 16:38:42 2009 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Thu, 18 Jun 2009 16:38:42 -0700 Subject: Problem svgcoat SNF 2009-06-18 16:38:40: control1 fail Message-ID: From vilanova at snf.stanford.edu Fri Jun 19 07:41:41 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 19 Jun 2009 07:41:41 -0700 Subject: Problem svgcoat SNF 2009-06-18 16:38:40: control1 fail Message-ID: The Bottom Resist waste Container was full thats why the system shutdown , Please check this before you cycle your wafers and empty it if nesessary From lwchang at snf.stanford.edu Fri Jun 19 21:46:15 2009 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Fri, 19 Jun 2009 21:46:15 -0700 Subject: Problem svgcoat SNF 2009-06-19 21:46:15: HP error Message-ID: HP would not transfer wafer after baking. From bchui at snf.stanford.edu Mon Jun 22 01:36:01 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 22 Jun 2009 01:36:01 -0700 Subject: Problem svgcoat SNF 2009-06-22 01:36:00: PEB HP rails stuck Message-ID: won't come together From gsosa at snf.stanford.edu Mon Jun 22 08:38:41 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 08:38:41 -0700 Subject: Shutdown svgcoat SNF 2009-06-22 08:38:41: Wafer lifter problem Message-ID: Wire lifters do not work consistently on bake module. Replacing motor for lifter drive. From gsosa at snf.stanford.edu Mon Jun 22 14:31:11 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 14:31:11 -0700 Subject: Shutdown svgcoat SNF 2009-06-22 08:38:41: Wafer lifter problem Message-ID: Replaced the lifter motor and lead screw on bake module. Cycled 25 wafers through system- All OK. Complete system test OK.. system ready yo use. From gsosa at snf.stanford.edu Mon Jun 22 14:31:22 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 14:31:22 -0700 Subject: Problem svgcoat SNF 2009-06-22 01:36:00: PEB HP rails stuck Message-ID: Replaced the lifter motor and lead screw on bake module. Cycled 25 wafers through system- All OK. Complete system test OK.. system ready yo use. From gsosa at snf.stanford.edu Mon Jun 22 14:31:28 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 14:31:28 -0700 Subject: Problem svgcoat SNF 2009-06-19 21:46:15: HP error Message-ID: Replaced the lifter motor and lead screw on bake module. Cycled 25 wafers through system- All OK. Complete system test OK.. system ready yo use. From dgunning at snf.stanford.edu Thu Jun 25 03:19:07 2009 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Thu, 25 Jun 2009 03:19:07 -0700 Subject: Comment svgcoat SNF 2009-06-25 03:19:07: messy hotplate Message-ID: please could users clean rings of resist off hotplate when not using EBR - it breaks wafers!