Problem svgcoat SNF 2009-03-04 16:00:03: Bad EBR

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Mar 5 07:59:11 PST 2009


checked all the programs ( 2,4,6,7,8, ) and Everything
Looks Good EBR and Uniformity , NOW for program # 3
That is for MANUAL dispense  (EBEAM) I think  is not 
the EBR Causing the Streaks but  it could be the way 
the resist is dispense or it could be that the Ebeam resist
is old. that's all I can think of The EBR dispense Looks Good.




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