Problem svgcoat SNF 2009-03-04 16:00:03: Bad EBR

[vilanova at snf.stanford.edu]

checked all the programs ( 2,4,6,7,8, ) and Everything
Looks Good EBR and Uniformity , NOW for program # 3
That is for MANUAL dispense  (EBEAM) I think  is not 
the EBR Causing the Streaks but  it could be the way 
the resist is dispense or it could be that the Ebeam resist
is old. that's all I can think of The EBR dispense Looks Good.