Comment svgcoat SNF 2009-03-07 02:51:00: EBR pressure

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Mar 9 08:35:14 PDT 2009


checked EBR pressure, EBR setting pressure should be 5
( something more than that will leave EBR residues on the 
wafers , specially to the thick resist. 




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