Comment svgcoat SNF 2009-03-13 15:39:42: 220-7 resist update

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Mar 13 15:39:42 PDT 2009


Installed a rebuilt cybor pump and re-plumbed resist lines with 1/4" OD tubing to dispense head and transitioned down to 3/16/OD x 0.127" ID to dispense point. Also figured out the cybor controller issues with suckback . We now have suckback control. We still need to improve the process. It is probably OK for coverage/protection, but not for imaging. 




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