Problem svgcoat SNF 2009-03-30 14:19:22: EBR back splash

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Mon Mar 30 14:19:22 PDT 2009

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Ran 4 wafers with 1 um 3612, two wafers came out with EBR splash all the way to center.

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