From elvislin at snf.stanford.edu Fri May 1 18:40:42 2009 From: elvislin at snf.stanford.edu (elvislin at snf.stanford.edu) Date: Fri, 1 May 2009 18:40:42 -0700 Subject: Problem svgcoat SNF 2009-05-01 18:40:41: wafer broken on track Message-ID: it seem the vacuum was lost while the wafer was spinning on the coater. the broken wafer is a regular prime wafer. From gsosa at snf.stanford.edu Mon May 4 13:20:07 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 May 2009 13:20:07 -0700 Subject: Problem svgcoat SNF 2009-05-01 18:40:41: wafer broken on track Message-ID: Replaced cup with clean process cup. Checked wafer centering and vacum- OK. Tested wafer handling. All OK/. From jwpchen at snf.stanford.edu Fri May 8 16:08:58 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Fri, 8 May 2009 16:08:58 -0700 Subject: Comment svgcoat SNF 2009-05-08 16:08:57: 7um looks great Message-ID: coated 4 wafers with 7um on May 7th. still some trapped bubbles during dispense but all the wafers still turned out looking great. i could almost use the word 'perfect' From king at snf.stanford.edu Mon May 11 22:01:00 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 11 May 2009 22:01:00 -0700 Subject: Problem svgcoat SNF 2009-05-11 22:00:59: 5 mm EBR is closer to 2mm Message-ID: thanks From bchui at snf.stanford.edu Tue May 12 00:59:30 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Tue, 12 May 2009 00:59:30 -0700 Subject: Problem svgcoat SNF 2009-05-12 00:59:30: Wafer mis-centered on bake chuck Message-ID: Conveyor belt moves way too fast than normal, landing the wafer past the center of the chuck (nearly outside the chuck boundary!). From vilanova at snf.stanford.edu Tue May 12 08:37:23 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 12 May 2009 08:37:23 -0700 Subject: Problem svgcoat SNF 2009-05-11 22:00:59: 5 mm EBR is closer to 2mm Message-ID: Adjusted 5MM EBR , Replaced Broken In\out PCB Board for the Hotplate, Cycled wafers, Ok to use. From vilanova at snf.stanford.edu Tue May 12 08:37:36 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 12 May 2009 08:37:36 -0700 Subject: Problem svgcoat SNF 2009-05-12 00:59:30: Wafer mis-centered on bake chuck Message-ID: Adjusted 5MM EBR , Replaced Broken In\out PCB Board for the Hotplate, Cycled wafers, Ok to use. From bchui at snf.stanford.edu Fri May 22 17:51:42 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 22 May 2009 17:51:42 -0700 Subject: Problem svgcoat SNF 2009-05-22 17:51:41: spin chuck acting strange Message-ID: conveyor belt doesn't move. Have to place wafer manually on chuck. use with caution. From vilanova at snf.stanford.edu Tue May 26 07:43:12 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 26 May 2009 07:43:12 -0700 Subject: Problem svgcoat SNF 2009-05-22 17:51:41: spin chuck acting strange Message-ID: remopved broken wafer pieces cleaned Catch cup hotplate and belts Cycled wafers, System Ok to use. From nvgirish at snf.stanford.edu Wed May 27 16:36:42 2009 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Wed, 27 May 2009 16:36:42 -0700 Subject: Problem svgcoat SNF 2009-05-27 16:36:41: Drop during EBR Message-ID: Blob of PR falls on wafer during EBR step. From vilanova at snf.stanford.edu Thu May 28 08:13:34 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 28 May 2009 08:13:34 -0700 Subject: Problem svgcoat SNF 2009-05-27 16:36:41: Drop during EBR Message-ID: Adjusted Suck Back , Cycled wafers, ok to use.