Problem svgcoat SNF 2009-05-12 00:59:30: Wafer mis-centered on bake chuck

bchui at snf.stanford.edu bchui at snf.stanford.edu
Tue May 12 00:59:30 PDT 2009


Conveyor belt moves way too fast than normal, landing the wafer past the center of the chuck (nearly outside the chuck boundary!).




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