Problem svgcoat SNF 2009-05-12 00:59:30: Wafer mis-centered on bake chuck

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue May 12 08:37:36 PDT 2009


Adjusted 5MM EBR , Replaced Broken In\out PCB Board for the
Hotplate, Cycled wafers, Ok to use. 




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