Problem svgcoat SNF 2009-05-27 16:36:41: Drop during EBR
nvgirish at snf.stanford.edu
nvgirish at snf.stanford.edu
Wed May 27 16:36:42 PDT 2009
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Problem svgcoat SNF 2009-05-22 17:51:41: spin chuck acting strange
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Problem svgcoat SNF 2009-05-27 16:36:41: Drop during EBR
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Blob of PR falls on wafer during EBR step.
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Problem svgcoat SNF 2009-05-22 17:51:41: spin chuck acting strange
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Problem svgcoat SNF 2009-05-27 16:36:41: Drop during EBR
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