From mahnaz at snf.stanford.edu Tue Nov 3 12:12:15 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 3 Nov 2009 12:12:15 -0800 Subject: Problem svgcoat SNF 2009-11-03 12:12:15: speed boat Message-ID: I looked at the quals wafers for 220-7, 7 um and did not look good. Lili sad that she cleaned the nozzle and ran 5 dummies. I have asked Lili to take pictures of the wafer and for now I call them "speed boat". I cleaned the nozzle and tried to help user "pponce" but still looks the dispense is not center. For the record, I cleaned the nozzle twice and ran 5 dummies. From kyunglok at snf.stanford.edu Wed Nov 4 16:30:09 2009 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Wed, 4 Nov 2009 16:30:09 -0800 Subject: Problem svgcoat SNF 2009-11-04 16:30:07: Track on the prime oven didn't work Message-ID: When I tried to use svgcoat1, it was just stuck, so I couldn't use it. The problem seemed to happen before I tried. From mtan at snf.stanford.edu Thu Nov 5 13:35:06 2009 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Thu, 5 Nov 2009 13:35:06 -0800 Subject: Problem svgcoat SNF 2009-11-05 13:35:06: autotrack doesn't work Message-ID: It has to be run in manual mode From vilanova at snf.stanford.edu Fri Nov 6 08:09:17 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 6 Nov 2009 08:09:17 -0800 Subject: Problem svgcoat SNF 2009-11-04 16:30:07: Track on the prime oven didn't work Message-ID: Someone left the track Under manual Mode, I checked Manual + auto Mode and Both of them are working Fine, All of the resist bottles are full ready for the weekend and the EBR Canisters ASwell. From vilanova at snf.stanford.edu Fri Nov 6 08:09:23 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 6 Nov 2009 08:09:23 -0800 Subject: Problem svgcoat SNF 2009-11-05 13:35:06: autotrack doesn't work Message-ID: Someone left the track Under manual Mode, I checked Manual + auto Mode and Both of them are working Fine, All of the resist bottles are full ready for the weekend and the EBR Canisters ASwell. From gsosa at snf.stanford.edu Fri Nov 6 09:21:53 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 6 Nov 2009 09:21:53 -0800 Subject: Shutdown svgcoat SNF 2009-11-06 09:21:53: Working on Dispense Arm Message-ID: Checking and adjusting dispense arm. From gsosa at snf.stanford.edu Fri Nov 6 14:49:43 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 6 Nov 2009 14:49:43 -0800 Subject: Shutdown svgcoat SNF 2009-11-06 09:21:53: Working on Dispense Arm Message-ID: Checked and releveled dispense arm bracket so that nozzles are square to the wafer. Checked and adjusted nozzle bracket fer proper nozzle centering and EBR arm position. Trimmed nozzle for thick resist and adjusted nozzle height. Adjusted pump suckback. Test wafers are coating very consistent with very minor defects( 1 to 3 per wafer. Overall the coatings look good. Will continue to work on 7 micron but OK to use. Please do not forget to run dummy wafers and clean the dispense nozzle. From gsosa at snf.stanford.edu Fri Nov 6 14:50:55 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 6 Nov 2009 14:50:55 -0800 Subject: Comment svgcoat SNF 2009-11-06 14:50:54: 7.0 micron Update 11/6/09 Message-ID: Checked and releveled dispense arm bracket so that nozzles are square to the wafer. Checked and adjusted nozzle bracket fer proper nozzle centering and EBR arm position. Trimmed nozzle for thick resist and adjusted nozzle height. Adjusted pump suckback. Test wafers are coating very consistent with very minor defects( 1 to 3 per wafer. Overall the coatings look good. Will continue to work on 7 micron but OK to use. Please do not forget to run dummy wafers and clean the dispense nozzle. From mahnaz at snf.stanford.edu Tue Nov 10 11:49:27 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 10 Nov 2009 11:49:27 -0800 Subject: Comment svgcoat SNF 2009-11-10 11:49:26: 7 um update Message-ID: I have to say that 7 um looks 10 fold better but still there are issues with the uniformity and speed boat. I have shown the wafers I ran this morning to Gary and Mario both. I did everything that I was suppose to do before running the wafers. Although I have to say that the issue is caused by viscosity of the resist combined with old track that does not have some of the features we like to have. I had some ideas and ran it by Gary and he likes to see if is doable. ( so he will make different recipe for me to test) I ran two different test this morning wafers with combination bake 100s @ 90 + 100s @ 115 thickness 71600A wafers with 200 second bake 71550 A From rhenn at snf.stanford.edu Sun Nov 15 16:39:21 2009 From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu) Date: Sun, 15 Nov 2009 16:39:21 -0800 Subject: Problem svgcoat SNF 2009-11-15 16:39:21: Error: Spindle at Bottom Message-ID: Will not process wafers. Performed track reset and recieved error that spindle was at bottom. From bchui at snf.stanford.edu Mon Nov 16 00:41:52 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 16 Nov 2009 00:41:52 -0800 Subject: Problem svgcoat SNF 2009-11-16 00:41:51: "spindle at bottom" error: did not use Message-ID: From vilanova at snf.stanford.edu Mon Nov 16 08:19:38 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 16 Nov 2009 08:19:38 -0800 Subject: Problem svgcoat SNF 2009-11-15 16:39:21: Error: Spindle at Bottom Message-ID: Re initialized system and checked Spindle, FOund A Wire Blocking the spindle to go up, Reseted Spindle cycled wafers ok to use. From vilanova at snf.stanford.edu Mon Nov 16 08:19:59 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 16 Nov 2009 08:19:59 -0800 Subject: Problem svgcoat SNF 2009-11-16 00:41:51: "spindle at bottom" error: did not use Message-ID: Re initialized system and checked Spindle, FOund A Wire Blocking the spindle to go up, Reseted Spindle cycled wafers ok to use. From chen0622 at snf.stanford.edu Mon Nov 16 12:32:03 2009 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Mon, 16 Nov 2009 12:32:03 -0800 Subject: Problem svgcoat SNF 2009-11-16 12:32:03: spindle issue Message-ID: From vilanova at snf.stanford.edu Tue Nov 17 08:36:16 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 17 Nov 2009 08:36:16 -0800 Subject: Problem svgcoat SNF 2009-11-16 12:32:03: spindle issue Message-ID: this one was cleared yesterday. From lilihsu at snf.stanford.edu Tue Nov 17 11:42:04 2009 From: lilihsu at snf.stanford.edu (lilihsu at snf.stanford.edu) Date: Tue, 17 Nov 2009 11:42:04 -0800 Subject: Problem svgcoat SNF 2009-11-17 11:42:03: 7um suck back Message-ID: while running the litho quals I noticed that on the 7 um resist there is a drip of resist left hanging out of the nozzle after it coats, which then dries and causes subsiquent wafers to be coated badly. From vilanova at snf.stanford.edu Wed Nov 18 09:17:51 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 18 Nov 2009 09:17:51 -0800 Subject: Problem svgcoat SNF 2009-11-18 09:17:50: DO NOT USE THICK RESIST 220-7 Pump is down!!!!!! Message-ID: From vilanova at snf.stanford.edu Wed Nov 18 14:45:22 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 18 Nov 2009 14:45:22 -0800 Subject: Problem svgcoat SNF 2009-11-18 09:17:50: DO NOT USE THICK RESIST 220-7 Pump is down!!!!!! Message-ID: Replaced Pump , Purged Line ( acetone) Adjusted Suck Back , Uniformity and thickness checked, Cycled wafers Ok to use. 1) Checke The Bottle Before you run your wafers! ( right now the Bottle is full ) some people Complaint About the Suck back and the reason why suck back was not working properly was because the bottle was almost empty. From vilanova at snf.stanford.edu Wed Nov 18 14:45:28 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 18 Nov 2009 14:45:28 -0800 Subject: Problem svgcoat SNF 2009-11-17 11:42:03: 7um suck back Message-ID: Replaced Pump , Purged Line ( acetone) Adjusted Suck Back , Uniformity and thickness checked, Cycled wafers Ok to use. 1) Checke The Bottle Before you run your wafers! ( right now the Bottle is full ) some people Complaint About the Suck back and the reason why suck back was not working properly was because the bottle was almost empty. From lizj at snf.stanford.edu Thu Nov 19 13:50:52 2009 From: lizj at snf.stanford.edu (lizj at snf.stanford.edu) Date: Thu, 19 Nov 2009 13:50:52 -0800 Subject: Problem svgcoat SNF 2009-11-19 13:50:51: track not working Message-ID: wafers just don't get out of sender index... maybe need reset but I couldn't find the reset combination. svgcoat2 has the same problem, sender index moves down, but the wafers won't come out. From gsosa at snf.stanford.edu Thu Nov 19 14:57:15 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 19 Nov 2009 14:57:15 -0800 Subject: Problem svgcoat SNF 2009-11-19 13:50:51: track not working Message-ID: Reset the track hardware. Tested operation. All OK. From gsosa at snf.stanford.edu Fri Nov 20 08:24:59 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Nov 2009 08:24:59 -0800 Subject: Shutdown svgcoat SNF 2009-11-20 08:24:59: Replacing Solinoid Message-ID: Replacing the chuck down solinoid on the spindle guide plate. From gsosa at snf.stanford.edu Fri Nov 20 09:50:47 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Nov 2009 09:50:47 -0800 Subject: Shutdown svgcoat SNF 2009-11-20 08:24:59: Replacing Solinoid Message-ID: Replaced spindle top and spindle bottom solinoids. Tested spindle movement- All OK. Tested track operation with standard program- All OK From bchui at snf.stanford.edu Fri Nov 20 18:25:03 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 20 Nov 2009 18:25:03 -0800 Subject: Problem svgcoat SNF 2009-11-20 18:25:02: Horrible uniformity for SPR200-7 Message-ID: Tons of air bubbles; the resulting resist surface is so rough you can't see your own reflection. From fried at snf.stanford.edu Sat Nov 21 14:50:58 2009 From: fried at snf.stanford.edu (fried at snf.stanford.edu) Date: Sat, 21 Nov 2009 14:50:58 -0800 Subject: Problem svgcoat SNF 2009-11-21 14:50:58: lots of bubbles in 10um resist Message-ID: lots of bubbles & poor uniformity on 10 um resist. can visibly see bubbles in the tube. From vilanova at snf.stanford.edu Mon Nov 23 08:09:10 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 23 Nov 2009 08:09:10 -0800 Subject: Problem svgcoat SNF 2009-11-20 18:25:02: Horrible uniformity for SPR200-7 Message-ID: checked and cleaned system ( Bowl , Dispense HOses chuck, purged Line and cycled wafers , I can Easily See my reflection On my wafers, 10 Mcrons with no EBR or even with EBR Doesnt give you Good A 100% NIce Uniformity But I cycled some wafers and they All Look Good , Ok to use. From vilanova at snf.stanford.edu Mon Nov 23 08:09:17 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 23 Nov 2009 08:09:17 -0800 Subject: Problem svgcoat SNF 2009-11-21 14:50:58: lots of bubbles in 10um resist Message-ID: checked and cleaned system ( Bowl , Dispense HOses chuck, purged Line and cycled wafers , I can Easily See my reflection On my wafers, 10 Mcrons with no EBR or even with EBR Doesnt give you Good A 100% NIce Uniformity But I cycled some wafers and they All Look Good , Ok to use. From nharjee at snf.stanford.edu Sat Nov 28 13:38:23 2009 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Sat, 28 Nov 2009 13:38:23 -0800 Subject: Problem svgcoat SNF 2009-11-28 13:38:22: 3612 drips after dispense Message-ID: During program "1.6 um w/o VP 2mm EBR", resist continues to drip after dispense while wafer is spinning. Looks like problem with suck back. From vilanova at snf.stanford.edu Mon Nov 30 08:34:05 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 30 Nov 2009 08:34:05 -0800 Subject: Problem svgcoat SNF 2009-11-28 13:38:22: 3612 drips after dispense Message-ID: We 've adjusted Suck Back and Purged Line, Cycled wafers , NO more drips suck loos Great and Uniformity Look Good, Ok to use.