Comment svgcoat SNF 2009-11-06 14:50:54: 7.0 micron Update 11/6/09

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Nov 6 14:50:55 PST 2009


Checked and releveled dispense arm bracket so that nozzles are square to the wafer. Checked and adjusted nozzle bracket fer proper nozzle centering and EBR arm position.  Trimmed nozzle for thick resist and adjusted nozzle height. Adjusted pump suckback. Test wafers are coating very consistent with very minor defects( 1 to 3 per wafer.  Overall the coatings look good. Will continue to work on 7 micron but OK to use. Please do not forget to run dummy wafers and clean the dispense nozzle.




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