Problem svgcoat SNF 2009-11-17 11:42:03: 7um suck back

lilihsu at snf.stanford.edu lilihsu at snf.stanford.edu
Tue Nov 17 11:42:04 PST 2009


while running the litho quals I noticed that on the 7 um resist there is a drip of resist left hanging out of the nozzle after it coats, which then dries and causes subsiquent wafers to be coated badly.




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