Problem svgcoat SNF 2009-11-18 09:17:50: DO NOT USE THICK RESIST 220-7 Pump is down!!!!!!

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Nov 18 14:45:22 PST 2009


Replaced Pump , Purged Line ( acetone) Adjusted Suck Back ,
 Uniformity and thickness checked, Cycled wafers Ok to use. 
1) Checke The Bottle Before you run your wafers! ( right now the 
Bottle is full ) some people Complaint About the Suck back and the 
reason why suck back was not working properly was because
the bottle was almost empty.




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