Problem svgcoat SNF 2009-11-21 14:50:58: lots of bubbles in 10um resist

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Nov 23 08:09:17 PST 2009


checked and cleaned system ( Bowl , Dispense HOses chuck, purged Line and cycled wafers , I can Easily See my reflection On my
wafers, 10 Mcrons with no EBR or even with EBR Doesnt give you 
 Good A 100% NIce Uniformity But I cycled some wafers and they All
 Look Good , Ok to use. 




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