Problem svgcoat SNF 2009-11-28 13:38:22: 3612 drips after dispense

nharjee at snf.stanford.edu nharjee at snf.stanford.edu
Sat Nov 28 13:38:23 PST 2009


During program "1.6 um w/o VP 2mm EBR", resist continues to drip after dispense while wafer is spinning. Looks like problem with suck back.




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