From gth at snf.stanford.edu Fri Oct 2 00:01:35 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Fri, 2 Oct 2009 00:01:35 -0700 Subject: Problem svgcoat SNF 2009-10-02 00:01:34: 1u 3612 Message-ID: Ran 10 dummies, all look bad - irrespective of EBR or no EBR. From gsosa at snf.stanford.edu Fri Oct 2 09:57:46 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 2 Oct 2009 09:57:46 -0700 Subject: Problem svgcoat SNF 2009-10-02 00:01:34: 1u 3612 Message-ID: Purged air bubbles out of resist dispense line. Checked bottle-OK. Tested with clean spin dummies- Looks good. From mferrier at snf.stanford.edu Fri Oct 2 16:19:43 2009 From: mferrier at snf.stanford.edu (mferrier at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:19:43 -0700 Subject: Problem svgcoat SNF 2009-10-02 16:19:43: resist dispense Message-ID: is dripping during the spinning. It results in big 'splash' on the wafer From jwpchen at snf.stanford.edu Fri Oct 2 20:35:40 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Fri, 2 Oct 2009 20:35:40 -0700 Subject: Comment svgcoat SNF 2009-10-02 20:35:40: re: previous problem Message-ID: which resist? I tried prog7 1um and it seemed fine From jwpchen at snf.stanford.edu Fri Oct 2 20:37:44 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Fri, 2 Oct 2009 20:37:44 -0700 Subject: Problem svgcoat SNF 2009-10-02 20:37:43: wafers overshoot cooling plate Message-ID: sometimes wafers overshoot the sensor on the cooling plate (seems to happen more often with double-polished wafers), the wafer then is led by the belt to crash into the receiving cassette, then gets stuck and all scratched up by the moving belt underneath From vilanova at snf.stanford.edu Mon Oct 5 07:58:05 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Oct 2009 07:58:05 -0700 Subject: Problem svgcoat SNF 2009-10-02 16:19:43: resist dispense Message-ID: Adjusted Resist Dispense, CLeaned Catch cup and belts , dummy wafers I found some particles and resist residues On the hotplate when the hotplate is dirty the alarms goes off because the vacuum is not working properly , please make sure the hotplate is clean before you start specially if someone runs the thick resist program before you, cleaned hotplate cycled several wafers , Ok to use From vilanova at snf.stanford.edu Mon Oct 5 07:58:12 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Oct 2009 07:58:12 -0700 Subject: Comment svgcoat SNF 2009-10-02 20:35:40: re: previous problem Message-ID: Adjusted Resist Dispense, CLeaned Catch cup and belts , dummy wafers I found some particles and resist residues On the hotplate when the hotplate is dirty the alarms goes off because the vacuum is not working properly , please make sure the hotplate is clean before you start specially if someone runs the thick resist program before you, cleaned hotplate cycled several wafers , Ok to use From vilanova at snf.stanford.edu Mon Oct 5 07:58:46 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Oct 2009 07:58:46 -0700 Subject: Problem svgcoat SNF 2009-10-02 20:37:43: wafers overshoot cooling plate Message-ID: Adjusted Resist Dispense, CLeaned Catch cup and belts , dummy wafers, I found some particles and resist residues On the hotplate when the hotplate is dirty the alarm goes off because the vacuum is not working properly , please make sure the hotplate is clean before you start, specially if someone runs the thick resist program before you, cleaned hotplate cycled several wafers , Ok to use From chienyuc at snf.stanford.edu Wed Oct 7 15:42:16 2009 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Wed, 7 Oct 2009 15:42:16 -0700 Subject: Problem svgcoat SNF 2009-10-07 15:42:15: resist dripping Message-ID: Similar as previous issues: found 3612 resist dripping during dispense. From gsosa at snf.stanford.edu Thu Oct 8 09:47:49 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 8 Oct 2009 09:47:49 -0700 Subject: Problem svgcoat SNF 2009-10-07 15:42:15: resist dripping Message-ID: Purged large air gap out of dispense lines. Checked all dispense lines and fittings back to bottle- Found no leaks. Checked and adjusted suckback and pump recovery speed. Dispense and suckback look good. Please report if problem re-occurs. From haiwei at snf.stanford.edu Tue Oct 13 22:26:02 2009 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Tue, 13 Oct 2009 22:26:02 -0700 Subject: Shutdown svgcoat SNF 2009-10-13 22:26:01: Spindle stuck in the middle Message-ID: From gsosa at snf.stanford.edu Wed Oct 14 08:44:26 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 14 Oct 2009 08:44:26 -0700 Subject: Shutdown svgcoat SNF 2009-10-13 22:26:01: Spindle stuck in the middle Message-ID: Checked and reseated connectors for solinoids. tested spindle positions- OK. Tested system operation-OK From nvgirish at snf.stanford.edu Thu Oct 15 21:28:11 2009 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Thu, 15 Oct 2009 21:28:11 -0700 Subject: Problem svgcoat SNF 2009-10-15 21:28:10: Backside Message-ID: Track is leaving some kind of spot residue on the back side. From vilanova at snf.stanford.edu Fri Oct 16 08:13:46 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 16 Oct 2009 08:13:46 -0700 Subject: Shutdown svgcoat SNF 2009-10-16 08:13:46: Under Maintenance ,repairng and cleaning . Message-ID: Under maitenance , repairing + cleaning , Sorry for the inconvinience. From vilanova at snf.stanford.edu Fri Oct 16 11:23:54 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 16 Oct 2009 11:23:54 -0700 Subject: Shutdown svgcoat SNF 2009-10-16 08:13:46: Under Maintenance ,repairng and cleaning . Message-ID: cleaned catch cup , adjustes exhaust system and EBR pressure, tested Ok , ready to use. From vilanova at snf.stanford.edu Fri Oct 16 11:24:23 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 16 Oct 2009 11:24:23 -0700 Subject: Problem svgcoat SNF 2009-10-15 21:28:10: Backside Message-ID: adjusted EBR canister pressure , Tested Ok to use. From king at snf.stanford.edu Mon Oct 19 18:07:46 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 19 Oct 2009 18:07:46 -0700 Subject: Problem svgcoat SNF 2009-10-19 18:07:46: SvgCoat1 spin track isn't working. Message-ID: From king at snf.stanford.edu Mon Oct 19 23:06:24 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 19 Oct 2009 23:06:24 -0700 Subject: Problem svgcoat SNF 2009-10-19 23:06:23: Svgcoat 1 clarification Message-ID: It was the first track that wouldn't work earlier; where the HMDS was. The track arms just stayed apart. Now it's working again. From vilanova at snf.stanford.edu Tue Oct 20 08:48:02 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 20 Oct 2009 08:48:02 -0700 Subject: Problem svgcoat SNF 2009-10-19 18:07:46: SvgCoat1 spin track isn't working. Message-ID: Cleaned Catch cup belts and hotplates , cycled wafers , ok to use the Prolbem was On track # 2 the HMDS Hotplate was full of Resist residues, I cleaned it up and I also cleaned the post bake hotplate and the catch cup + belts, Cycled dummy wafers, Ok to use. From vilanova at snf.stanford.edu Tue Oct 20 08:48:16 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 20 Oct 2009 08:48:16 -0700 Subject: Problem svgcoat SNF 2009-10-19 23:06:23: Svgcoat 1 clarification Message-ID: Cleaned Catch cup belts and hotplates , cycled wafers , ok to use the Prolbem was On track # 2 the HMDS Hotplate was full of Resist residues, I cleaned it up and I also cleaned the post bake hotplate and the catch cup + belts, Cycled dummy wafers, Ok to use. From mahnaz at snf.stanford.edu Thu Oct 22 14:39:30 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 22 Oct 2009 14:39:30 -0700 Subject: Problem svgcoat SNF 2009-10-22 14:39:30: nonuniform 7 um Message-ID: I ran 7 um 220-7 today, After cleaning the nozzle with q-tips and acetone and running 5 dummies with 100 seconds bake, wafers are no good. I noticed that the tip of nozzle is not straight and no matter what , the resist does not dispense correctly till after has sat in the center of wafers for a few seconds. From gth at snf.stanford.edu Sun Oct 25 23:31:28 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sun, 25 Oct 2009 23:31:28 -0700 Subject: Problem svgcoat SNF 2009-10-25 23:31:27: spindle stuck, beeps, PR3612 spotty. Message-ID: From gth at snf.stanford.edu Mon Oct 26 02:27:35 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Mon, 26 Oct 2009 02:27:35 -0700 Subject: Shutdown svgcoat SNF 2009-10-26 02:27:34: bad spindle - slight beeping - bad 3612 if works Message-ID: From vilanova at snf.stanford.edu Mon Oct 26 08:32:52 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 26 Oct 2009 08:32:52 -0700 Subject: Shutdown svgcoat SNF 2009-10-26 02:27:34: bad spindle - slight beeping - bad 3612 if works Message-ID: 1) Spindle working Perfectly Fine, Calibrated Spindle cycles wafers Dispense Good Uniformity Good, The reason the Spindle wasnt moving or it was beeping was because the Hotplate was full of resist . 2) Thick resist dispnese is Good and Uniformity Looks Good ( we have saved wafers to show to the user ) Maybe the bottle was either empty or someone changed it and the system needed it the line to be purged, Sometimes running 2 dummy wafers doesnt do any Good because the amount of resist that goes On the wafer os small so maybe there was an air gap in the line 3) We need a better description of the problem NOt onl y " system Beeping ,Bad Spindle ) EVERYTHING HAS BEEN TESTED AND CALIBRATED READY TO USE From vilanova at snf.stanford.edu Mon Oct 26 08:32:57 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 26 Oct 2009 08:32:57 -0700 Subject: Problem svgcoat SNF 2009-10-22 14:39:30: nonuniform 7 um Message-ID: 1) Spindle working Perfectly Fine, Calibrated Spindle cycles wafers Dispense Good Uniformity Good, The reason the Spindle wasnt moving or it was beeping was because the Hotplate was full of resist . 2) Thick resist dispnese is Good and Uniformity Looks Good ( we have saved wafers to show to the user ) Maybe the bottle was either empty or someone changed it and the system needed it the line to be purged, Sometimes running 2 dummy wafers doesnt do any Good because the amount of resist that goes On the wafer os small so maybe there was an air gap in the line 3) We need a better description of the problem NOt onl y " system Beeping ,Bad Spindle ) EVERYTHING HAS BEEN TESTED AND CALIBRATED READY TO USE From vilanova at snf.stanford.edu Mon Oct 26 08:33:02 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 26 Oct 2009 08:33:02 -0700 Subject: Problem svgcoat SNF 2009-10-25 23:31:27: spindle stuck, beeps, PR3612 spotty. Message-ID: 1) Spindle working Perfectly Fine, Calibrated Spindle cycles wafers Dispense Good Uniformity Good, The reason the Spindle wasnt moving or it was beeping was because the Hotplate was full of resist . 2) Thick resist dispnese is Good and Uniformity Looks Good ( we have saved wafers to show to the user ) Maybe the bottle was either empty or someone changed it and the system needed it the line to be purged, Sometimes running 2 dummy wafers doesnt do any Good because the amount of resist that goes On the wafer os small so maybe there was an air gap in the line 3) We need a better description of the problem NOt onl y " system Beeping ,Bad Spindle ) EVERYTHING HAS BEEN TESTED AND CALIBRATED READY TO USE From fried at snf.stanford.edu Tue Oct 27 10:47:39 2009 From: fried at snf.stanford.edu (fried at snf.stanford.edu) Date: Tue, 27 Oct 2009 10:47:39 -0700 Subject: Comment svgcoat SNF 2009-10-27 10:47:38: poor coverage recipe 2 Message-ID: Observed streaks on outside of wafers possible air bubbles