Problem svgcoat SNF 2009-10-02 20:37:43: wafers overshoot cooling plate

jwpchen at snf.stanford.edu jwpchen at snf.stanford.edu
Fri Oct 2 20:37:44 PDT 2009


sometimes wafers overshoot the sensor on the cooling plate (seems to happen more often with double-polished wafers), the wafer then is led by the belt to crash into the receiving cassette, then gets stuck and all scratched up by the moving belt underneath




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