Problem svgcoat SNF 2009-10-02 20:37:43: wafers overshoot cooling plate

jwpchen at jwpchen at
Fri Oct 2 20:37:44 PDT 2009

sometimes wafers overshoot the sensor on the cooling plate (seems to happen more often with double-polished wafers), the wafer then is led by the belt to crash into the receiving cassette, then gets stuck and all scratched up by the moving belt underneath

More information about the svgcoat-pcs mailing list