Problem svgcoat SNF 2009-10-02 16:19:43: resist dispense

vilanova at vilanova at
Mon Oct 5 07:58:05 PDT 2009

Adjusted Resist Dispense, CLeaned Catch cup and belts , dummy 
wafers I found some particles and resist residues On the hotplate
when the hotplate is dirty  the alarms goes off because the vacuum
is not working properly , please make sure the hotplate is clean before
 you start  specially if someone runs the thick resist program before 
you, cleaned hotplate cycled several wafers , Ok to use 

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