Problem svgcoat SNF 2009-10-02 20:37:43: wafers overshoot cooling plate

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Oct 5 07:58:46 PDT 2009


Adjusted Resist Dispense, CLeaned Catch cup and belts , dummy 
wafers, I found some particles and resist residues On the hotplate
when the hotplate is dirty  the alarm goes off because the vacuum
is not working properly , please make sure the hotplate is clean before
 you start,  specially if someone runs the thick resist program before 
you, cleaned hotplate cycled several wafers , Ok to use 




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