Problem svgcoat SNF 2009-10-19 18:07:46: SvgCoat1 spin track isn't working.

vilanova at vilanova at
Tue Oct 20 08:48:02 PDT 2009

Cleaned Catch cup belts and hotplates , cycled wafers , ok to use
the Prolbem was On track # 2 the HMDS Hotplate was full of
Resist residues, I cleaned it up and I also cleaned the post bake
hotplate and the catch cup + belts, Cycled dummy wafers, Ok 
to use. 

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