Problem svgcoat SNF 2009-10-19 23:06:23: Svgcoat 1 clarification

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Oct 20 08:48:16 PDT 2009


Cleaned Catch cup belts and hotplates , cycled wafers , ok to use
the Prolbem was On track # 2 the HMDS Hotplate was full of
Resist residues, I cleaned it up and I also cleaned the post bake
hotplate and the catch cup + belts, Cycled dummy wafers, Ok 
to use. 




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