Problem svgcoat SNF 2009-10-22 14:39:30: nonuniform 7 um

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Thu Oct 22 14:39:30 PDT 2009


I ran 7 um 220-7 today,
After cleaning the nozzle with q-tips and acetone and running 5 dummies with 100 seconds bake, wafers are no good.
I noticed that the tip of nozzle is not straight and no matter what , the resist does not dispense correctly till after has sat in the center of wafers for a few seconds.




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