From jprovine at snf.stanford.edu Mon Sep 7 15:23:10 2009 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 7 Sep 2009 15:23:10 -0700 Subject: Comment svgcoat SNF 2009-09-07 15:23:10: wafer upstream error Message-ID: the coater track keeps giving an upstream vacuum error for the last wafer in the cassette. it is like the system isn't recognizing the empty load casssette. however, this is not a problem and while slightly annoying everything works fine if you clear the alarm and reset the cassettes; so there is no problem getting wafers done. From vilanova at snf.stanford.edu Mon Sep 14 09:05:20 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 14 Sep 2009 09:05:20 -0700 Subject: Comment svgcoat SNF 2009-09-14 09:05:20: weekly PM Completed. Message-ID: cleaned catch cup hotplata arms belts dispensers, refill canister and resist bottles ,. cleaned dummy wafers , Cycled system , Ok to use. From king at snf.stanford.edu Wed Sep 16 19:23:06 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 16 Sep 2009 19:23:06 -0700 Subject: Problem svgcoat SNF 2009-09-16 19:23:06: Track errors Message-ID: From rostam at snf.stanford.edu Wed Sep 16 21:01:55 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Wed, 16 Sep 2009 21:01:55 -0700 Subject: Problem svgcoat SNF 2009-09-16 21:01:52: track not working Message-ID: From gsosa at snf.stanford.edu Thu Sep 17 09:12:38 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 17 Sep 2009 09:12:38 -0700 Subject: Problem svgcoat SNF 2009-09-16 19:23:06: Track errors Message-ID: Tested track operation and wafer handling. All OK. Fine-adjusted wafer centering and adjusted EBR width to 2 mm. From gsosa at snf.stanford.edu Thu Sep 17 09:12:44 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 17 Sep 2009 09:12:44 -0700 Subject: Problem svgcoat SNF 2009-09-16 21:01:52: track not working Message-ID: Tested track operation and wafer handling. All OK. Fine-adjusted wafer centering and adjusted EBR width to 2 mm. From narii at snf.stanford.edu Fri Sep 18 02:06:09 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Fri, 18 Sep 2009 02:06:09 -0700 Subject: Problem svgcoat SNF 2009-09-18 02:06:09: Spinner doesn't work Message-ID: Not spinning at all From ofidaner at snf.stanford.edu Fri Sep 18 12:40:32 2009 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Fri, 18 Sep 2009 12:40:32 -0700 Subject: Shutdown svgcoat SNF 2009-09-18 12:40:31: see the previously reported problem Message-ID: From gsosa at snf.stanford.edu Mon Sep 21 15:48:09 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Sep 2009 15:48:09 -0700 Subject: Problem svgcoat SNF 2009-09-18 02:06:09: Spinner doesn't work Message-ID: Spindle Problem- Found a brocken plastic coupling between motor and spindle. Replaced the coupling and re-assembled. Checked and performed spindle calibration. Checked coat module operation- All OK. Adjusted EBR width to 2mm. Indexer Problem- Found that index sensor for slot position and bottom position not working. Replaced indexer wire harness and PC board. Adjusted comb position for proper slotting and tested indexer- OK. Tested track operation in auto - All functions OK. From gsosa at snf.stanford.edu Mon Sep 21 15:48:15 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Sep 2009 15:48:15 -0700 Subject: Shutdown svgcoat SNF 2009-09-18 12:40:31: see the previously reported problem Message-ID: Spindle Problem- Found a brocken plastic coupling between motor and spindle. Replaced the coupling and re-assembled. Checked and performed spindle calibration. Checked coat module operation- All OK. Adjusted EBR width to 2mm. Indexer Problem- Found that index sensor for slot position and bottom position not working. Replaced indexer wire harness and PC board. Adjusted comb position for proper slotting and tested indexer- OK. Tested track operation in auto - All functions OK. From nppatil at snf.stanford.edu Thu Sep 24 18:24:17 2009 From: nppatil at snf.stanford.edu (nppatil at snf.stanford.edu) Date: Thu, 24 Sep 2009 18:24:17 -0700 Subject: Problem svgcoat SNF 2009-09-24 18:24:16: spinner makes bad noise Message-ID: the motor of wafer coater makes noise at high speed 5krpm From gsosa at snf.stanford.edu Fri Sep 25 10:32:18 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Sep 2009 10:32:18 -0700 Subject: Shutdown svgcoat SNF 2009-09-25 10:32:17: spindle noise Message-ID: Spindle making too much noise From gsosa at snf.stanford.edu Fri Sep 25 15:55:48 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Sep 2009 15:55:48 -0700 Subject: Problem svgcoat SNF 2009-09-24 18:24:16: spinner makes bad noise Message-ID: Replaced motor and spindle assembly. Calibrated spindle. Tested track operation. All OK From gsosa at snf.stanford.edu Fri Sep 25 15:55:56 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Sep 2009 15:55:56 -0700 Subject: Shutdown svgcoat SNF 2009-09-25 10:32:17: spindle noise Message-ID: Replaced motor and spindle assembly. Calibrated spindle. Tested track operation. All OK From narii at snf.stanford.edu Sun Sep 27 13:28:00 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 27 Sep 2009 13:28:00 -0700 Subject: Problem svgcoat SNF 2009-09-27 13:27:59: Spindle at bottom Message-ID: Spindle is just half way up and doesn't come up completely even after reset. From vilanova at snf.stanford.edu Mon Sep 28 07:46:20 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 28 Sep 2009 07:46:20 -0700 Subject: Problem svgcoat SNF 2009-09-27 13:27:59: Spindle at bottom Message-ID: vacuum hose was blocking the Spindle , this was making the spindle not coming complely Up. I moved the HOse to a diferent location and tested = Cyled wafers , ok to use. From vilanova at snf.stanford.edu Mon Sep 28 07:47:54 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 28 Sep 2009 07:47:54 -0700 Subject: Comment svgcoat SNF 2009-09-07 15:23:10: wafer upstream error Message-ID: this problem was fixed last week, Also I cleaned the belts hotplate and catch cu[ , Daily Clean and Test completed.