Comment svgcoat SNF 2009-09-07 15:23:10: wafer upstream error

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Mon Sep 7 15:23:10 PDT 2009


the coater track keeps giving an upstream vacuum error for the last wafer in the cassette.  it is like the system isn't recognizing the empty load casssette.  however, this is not a problem and while slightly annoying everything works fine if  you clear the alarm and reset the cassettes; so there is no problem getting wafers done.




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