From mahnaz at snf.stanford.edu Fri Apr 2 10:01:03 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 2 Apr 2010 10:01:03 -0700 Subject: Comment svgcoat SNF 2010-04-02 10:01:02: cleaned all the dummis Message-ID: From mahnaz at snf.stanford.edu Tue Apr 13 12:00:38 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 13 Apr 2010 12:00:38 -0700 Subject: Comment svgcoat SNF 2010-01-29 10:28:19: 220-7 Message-ID: ran the test on 7 um. looks okay thickness ~7100A, few speed boat. back of wf clean. keeping the wf for the next few days From mahnaz at snf.stanford.edu Tue Apr 13 12:06:51 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 13 Apr 2010 12:06:51 -0700 Subject: Comment svgcoat SNF 2010-04-13 12:06:51: 3617m Message-ID: Ran test on it , thickness~1300A on program 5 without V/P 2mm EBR. two speed boat on the front of wf and the back came out with few junk on it, do not know why?/ From vilanova at snf.stanford.edu Mon Apr 19 11:42:19 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 19 Apr 2010 11:42:19 -0700 Subject: Comment svgcoat SNF 2010-04-02 10:01:02: cleaned all the dummis Message-ID: cleaned catch cup & Exhaust system,cycled & ran 7 MIcron program . 99.9% the wafers Uniformity looks Good Just a tiny particle on the EBR side of the wafer Noticed, Also I ran 3617 and the bottom of the wafer came Out clean and uniformity looks Good aswell . From vilanova at snf.stanford.edu Mon Apr 19 11:42:27 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 19 Apr 2010 11:42:27 -0700 Subject: Comment svgcoat SNF 2010-04-13 12:06:51: 3617m Message-ID: cleared, From pnataraj at snf.stanford.edu Sat Apr 24 17:57:54 2010 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Sat, 24 Apr 2010 17:57:54 -0700 Subject: Problem svgcoat SNF 2010-04-24 17:57:53: wafer just sits on the chuck Message-ID: I was hoping to get some 4um resist work. The wafer goes through and sits on the spin chuck, if anyone know how to fix it, greatly appreciated! Thanks From vilanova at snf.stanford.edu Mon Apr 26 11:18:18 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 26 Apr 2010 11:18:18 -0700 Subject: Problem svgcoat SNF 2010-04-24 17:57:53: wafer just sits on the chuck Message-ID: I noticed that In the computer screen ( coat # 1 ) someone was running track # 2 , mayb ethis i swhy the wafer didnt move, Re-started the computer system and cycled wafers, Ok to use. From hongyuc at snf.stanford.edu Mon Apr 26 23:44:00 2010 From: hongyuc at snf.stanford.edu (hongyuc at snf.stanford.edu) Date: Mon, 26 Apr 2010 23:44:00 -0700 Subject: Problem svgcoat SNF 2010-04-26 23:44:00: litho qual result Message-ID: Cleaning the nozzles with acetone and two dummies before coating good wafers for each PR. EBR is "a little" uneven. PR coating for 1.6 um and 3617 1.6um is not good. The resist has a little streak in it. In addition, PR caoting for 7 um is not uniform. The resist has obvious streak in it. From mahnaz at snf.stanford.edu Tue Apr 27 15:46:20 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 27 Apr 2010 15:46:20 -0700 Subject: Problem svgcoat SNF 2010-04-27 15:46:20: 3617m Message-ID: checking Henry's quals wfs I have noticed EBR Residue on the back of all 3 wafers. From vilanova at snf.stanford.edu Thu Apr 29 10:28:44 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 29 Apr 2010 10:28:44 -0700 Subject: Problem svgcoat SNF 2010-04-27 15:46:20: 3617m Message-ID: cleaned dispense hose EBR nozzles belts and chuck , cycled wafers 3617 Uniformity Looks Good and back of wafers nice and clean, cleaned Hotplate, ok to use.