Comment svgcoat SNF 2010-04-02 10:01:02: cleaned all the dummis

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Apr 19 11:42:19 PDT 2010


cleaned catch cup & Exhaust system,cycled & ran  7 MIcron program .
99.9% the wafers Uniformity looks Good Just a tiny particle on the EBR
side of the wafer Noticed, Also I ran 3617 and the bottom of the wafer
came Out clean and uniformity looks Good aswell . 




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