Comment svgcoat SNF 2010-04-02 10:01:02: cleaned all the dummis

[vilanova at snf.stanford.edu]

cleaned catch cup & Exhaust system,cycled & ran  7 MIcron program .
99.9% the wafers Uniformity looks Good Just a tiny particle on the EBR
side of the wafer Noticed, Also I ran 3617 and the bottom of the wafer
came Out clean and uniformity looks Good aswell .