Problem svgcoat SNF 2010-04-24 17:57:53: wafer just sits on the chuck

pnataraj at snf.stanford.edu pnataraj at snf.stanford.edu
Sat Apr 24 17:57:54 PDT 2010


I was hoping to get some 4um resist work.
The wafer goes through and sits on the spin chuck, if anyone know
how to fix it, greatly appreciated! 
Thanks




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