Problem svgcoat SNF 2010-04-24 17:57:53: wafer just sits on the chuck

pnataraj at pnataraj at
Sat Apr 24 17:57:54 PDT 2010

I was hoping to get some 4um resist work.
The wafer goes through and sits on the spin chuck, if anyone know
how to fix it, greatly appreciated! 

More information about the svgcoat-pcs mailing list