Problem svgcoat SNF 2010-04-24 17:57:53: wafer just sits on the chuck

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Apr 26 11:18:18 PDT 2010


I noticed that In the computer screen ( coat # 1 ) 
 someone was running track # 2 , mayb ethis i swhy the wafer didnt 
move, Re-started the computer system and cycled wafers, Ok to use. 




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