Problem svgcoat SNF 2010-04-26 23:44:00: litho qual result

hongyuc at snf.stanford.edu hongyuc at snf.stanford.edu
Mon Apr 26 23:44:00 PDT 2010


Cleaning the nozzles with acetone and two dummies before coating good wafers for each PR. EBR is "a little" uneven. PR coating for 1.6 um and 3617 1.6um is not good. The resist has a little streak in it. In addition, PR caoting for 7 um is not uniform. The resist has obvious streak in it. 




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